JPS6276532U - - Google Patents
Info
- Publication number
- JPS6276532U JPS6276532U JP16878085U JP16878085U JPS6276532U JP S6276532 U JPS6276532 U JP S6276532U JP 16878085 U JP16878085 U JP 16878085U JP 16878085 U JP16878085 U JP 16878085U JP S6276532 U JPS6276532 U JP S6276532U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- etching
- chamber
- plasma
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims 2
- 238000001020 plasma etching Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16878085U JPS6276532U (en]) | 1985-11-01 | 1985-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16878085U JPS6276532U (en]) | 1985-11-01 | 1985-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6276532U true JPS6276532U (en]) | 1987-05-16 |
Family
ID=31101971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16878085U Pending JPS6276532U (en]) | 1985-11-01 | 1985-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276532U (en]) |
-
1985
- 1985-11-01 JP JP16878085U patent/JPS6276532U/ja active Pending